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Pfeiffer HiPace 300H turbomolecular pump (CF 6.0″) 3D model
Pumps

Pfeiffer HiPace 300H turbomolecular pump (CF 6.0″)

1 × CF 6.0″ ConFlat flange and 81.7 cm² of wetted surface.

Build a system with this part

Its rated speed feeds the effective-pumping-speed and pumpdown simulations, which combine it with the conductance of everything between it and your chamber.

Specifications

TypePfeiffer HiPace 300H turbomolecular pump (CF 6.0″)
Flanges1 × CF 6.0″ ConFlat (CF), knife-edge, copper gasket
Ports1
Internal gas volume—
Wetted surface area81.7 cm²
MaterialStainless 304
Overall size161 × 207 × 186 mm
Pumping speed260 L/s (N2) · 255 L/s (He) · 220 L/s (H2)
Outgassing (unbaked, 1 h)6.0e-9 Torr·L/s/cm²
Simulation-readyNot yet

Volume and surface area are computed from the CAD model's enclosed gas space. Material outgassing values are typical published figures.

Parts that mate with CF 6.0″ flanges

CF 6.0″ 6-port multiport chamber CF 6.0″ 6-port multiport chamberCF 6.0″ · 2,224 cm³CF 6.0″ 6-port box chamber CF 6.0″ 6-port box chamberCF 6.0″ · 2,243 cm³CF 6.0″ feedthrough CF 6.0″ feedthroughCF 6.0″CF 6.0″ blank flange CF 6.0″ blank flangeCF 6.0″CF 6.0″ to CF 4.5″ reducer CF 6.0″ to CF 4.5″ reducerCF 6.0″ / CF 4.5″ · 556 cm³CF 6.0″ to CF 2.75″ zero-length reducer CF 6.0″ to CF 2.75″ zero-length reducerCF 6.0″ / CF 2.75″ · 33 cm³CF 10.0″ to CF 6.0″ reducer CF 10.0″ to CF 6.0″ reducerCF 10.0″ / CF 6.0″ · 991 cm³CF 13.25″ to CF 6.0″ zero-length reducer CF 13.25″ to CF 6.0″ zero-length reducerCF 13.25″ / CF 6.0″ · 300 cm³